�جF(xi��n)�� | <0.002MM | ���γߴ�(L��W��H) | 541��460��705mm |
��������(bi��o)��(zh��n) | 0.4um | �_(t��i)���С | 460��313mm |
��(q��)��(d��ng) | 0.1um | �C(j��)�_(t��i)���� | 80kg |
���Ծ��� | ��(2+L/150) um | �Ŵ�(sh��) | 15X-100X |
���� | ��2um | �_(t��i)����� | 36kg |
X�г� | 200mm | �y(c��)���ٶ� | 500mm/min |
Y�г� | 100mm | CCD | SONY������ |